【作者】 李徐钰； 魏朝阳； 徐文东； 邵建达；

【Author】 Xuyu Li;Chaoyang Wei;Wendong Xu;Jianda Shao;Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences;

【机构】 中国科学院上海精密机械研究所；

【摘要】 针对小磨头抛光加工非球面,利用弹性力学中的有限单元法分析磨头的受力分布,并结合Preston方程和行星运动模型仿真得到了在非球面上的去除函数。通过对比该算法得到的去除函数与均匀分布得到的去除函数,来证明修正非球面上去除函数的必要性。采用顶点曲率半径2000m的抛物非球面、15m半径的聚氨酯抛光盘作为分析对象,仿真结果表明将公转半径设定为8m左右最佳。最后引入了去除峰值变化率作为衡量去除函数随离轴位置的指标,定性的分析了离轴量对于去除函数的影响。更多还原

【Abstract】 In terms of polishing aspheric by small polishing pad,we analyzed the pressure distribution between the polishing pad and the surface by finite element method from the elastic mechanics.The tool influence function is derived from Preston equation and the planet motion.This paper proved the necessarity of amending the TIF by contrasting the TIF with uniform pressure distribution and the TIF with non-uniform pressure distribution.We take the parabolic aspheric with a 2000 mm vertex curvature radius and a polyurethane polishing pad with 15 mm radius as the subjects of study.The result shows that 8mm is the optimum radius of revolution.Finally,the rate of peak change is proposed to evaluate the changing TIF with different off-axis position,which can describe how the off-axis distance affects the TIF qualitatively.更多还原