【作者】 侯晶； 王洪祥； 陈贤华； 谢瑞清； 邓文辉； 唐才学； 颜浩； 金会良；

【Author】 Hou Jing;Wang Hong-xiang;Chen Xian-hua;Xie Rui-qing;Deng Wen-hui;Tang Cai-xue;Yan Hao;Jin Hui-liang;Harbin Institute of Technology;Research Center of Laser Fusion,China Academy of Engineer Physics;

【机构】 哈尔滨工业大学； 中国工程物理研究院激光聚变研究中心；

【摘要】 磁流变抛光具有"柔性抛光"的特点,能够得到高面形精度、高质量的光学表面。本文介绍了磁流变加工原理及元件加工的整体工艺流程。在流程中描述了抛光斑去除函数的提取及工艺软件的功能,利用国产的磁流变抛光设备开展了加工工艺的研究,对一件800mm×400mm的元件进行了工艺实验,利用检测设备测得了元件的低、中、高频的加工指标。反射波前PV值34nm,中频PSD1值1.7nm,高频粗糙度Rq值0.27nm,得到了较好的实验结果,利用磁流变加工技术实现了大口径光学元件的高精度加工。本文还阐述了磁流变加工技术在高功率激光器元件中应用的优点。更多还原

【Abstract】 The magnetic rheological polishing with " the flexible polishing " characteristics,can obtain high surface precision,high quality of the optical surface.This paper introduces the magnetorheological machining principle and components of the overall process.Cast light spot removal function is described in the process of extraction and processing software functions.Using magnetic rheological polishing device of domestic,the processing technology research,on a800 mm long,400 mm wide,the process of experiment.We can get the Pv value of 34 nm,roughness Rq value of 0.2nm which represent high quality index,and in this way,large diameter high precision machining of components is realized.This paper expounds the magnetorhelogical processing technology used in high power laser components and the advantages of the key technology of the need for the further study.更多还原