【作者】 徐隆波； 周游； 朱日宏； 刘世杰； 郑万国；

【Author】 Longbo Xu;You Zhou;Rihong Zhu;Shijie Liu;Nanjing university of science and technology;CAS Key Laboratory of laser materials;Chins Academy of Engineering Physics;CAEP Research Center of Laser Fusion;

【机构】 南京理工大学电子工程与光电技术学院； 中国工程物理研究院； 中国科学院强激光材料重点实验室； 中国工程物理研究院激光聚变研究中心；

【摘要】 高功率激光装置中,大口径矩形反射类光学元件大多是在斜入射条件下使用,入射角为45°或57°等,其在使用角度下的反射波前要求被准确测量。然而,由于受到测量设备和待测元件反射率的限制,测量角度通常和使用角度不完全相同,这将引入测量误差。本文提出了对测量角度下的反射波前进行相位校正以获得使用角度下的反射波前,并利用双三次插值算法对横向尺寸进行校正的方法。经验证,利用该方法发将0°反射波前换算到45°反射波前得到的测试结果与45°直接测量得到的测试结果相比,PV值相差0.01λ,RMS值相差0.003λ,PSDl相差0.08nm。实验表明该换算方法不仅能够准确计算出使用角度下反射波前的低频误差,而且能获得相对准确的中频段PSD1误差。更多还原

【Abstract】 Most of the large reflective optics with rectangular shape are working at oblique incidence,e.g.45° or57°,where the reflective wavefront errors are required to be accurately measured.Due to the limitation of measurement equipment or the reflectivity of optics,the difference between the measurement angle and the use angle will produce an indirect measurement results.In this paper,phase correction method between the measurement and use wavefront is proposed,which the horizontal dimension is corrected by bicubic interpolation.Comparing with the results from normal incidence,the differences between PV,RMS and PSD1 are 0.01λ,0.003λ and 0.08 nm,respectively.The experimental results show that the proposed method can be used to accurately calculate the low frequency error as well as PSD1 of mid-frequency error.更多还原