【作者】 李玉和； 管恺森； 乔振东； 伍震环； 祁鑫；

【Author】 Li Yuhe;Guan Kaisen;Qiao Zhendong;Wu Zhenhuan;Qi Xin;Department of Precision Instrument,Tsinghua University,State Key Laboratory of Precision Measurement Technology and Instruments;

【机构】 清华大学精密仪器系精密测试技术及仪器国家重点实验室；

【摘要】 近场存储技术中飞行头与存储介质间飞行高度测试成为高密度存储关键技术。本文采用双波长多步法对测试进行数学建模,利用改进遗传算法实现高非线性光学方程组求解;搭建飞行高度测试实验系统,对"起飞"、"着陆"飞行过程进行测试实验与分析计算,与DFHT比对结果表明:工作状态下近场飞高为67nm,飞高波动小于3nm,该测试方法及求解算法可满足飞行头纳米尺度飞高测量要求。更多还原

【Abstract】 The height measurement of near-field storage between flying head and its storage medium has become the key techniques in high density storage.A dual wavelength multistep method for measuring flying height is constructed.An improved genetic algorithm is used to solve high nonlinear equations.The complex refractive index which can cause measurement error,is calibrated by the proposed method simultaneousnly.Both simulation analysis and experimental results show that the near-field working distance is67 nm,flying height disturbance about 3nm,then this method and algorithm can meet measurement requirement of micro & nano_scale flying height.更多还原