【作者】 王伟； 张国玉； 包宇； 牛利；

【Author】 Wei Wang;Guoyu Zhang;Yu Bao;Li Niu;The School of Photo-Electronic Engineering, Changchun University of Science and Technology;Changchun Institute of Applied Chemistry, Chinese Academy of Sciences;

【机构】 长春理工大学光电工程学院； 中国科学院长春应用化学研究所；

【摘要】 压电陶瓷定位系统是电化学成像检测装置中的重要组成部分,是实现高分辨电化学成像检测的关键,一般可以达到纳米级的位移分辨率和定位精度。本文详细地阐述了电阻应变片测量压电陶瓷输出位移的原理,并通过自行搭建的高压驱动电路和位移检测电路,对集成了电阻应变片传感器的压电陶瓷定位系统分别在开环控制和闭环控制下进行了测试,闭环控制算法采用了经典的PID算法。测试结果表明压电陶瓷定位系统在开环控制下确实存在着严重的非线性、迟滞性和蠕变性问题,而在闭环控制下这些问题都很好的得到了解决。更多还原

【Abstract】 The piezoelectric ceramic positioning system is an important part in the electrochemical imaging detector device, which can achieve the nanometer scale displacement resolution and positioning accuracy. This paper describes in detail the principle of output displacement measuring for piezoelectric ceramic by the resistance strain gauge. In addition, by employing the self-built high voltage drive circuit and the displacement detecting circuit, integrated piezoelectric ceramic positioning system resistance strain gauge sensor has been investigated under both open-loop and closed-loop control, respectively. Test results show that the piezoelectric ceramics positioning system in open-loop control exhibits serious non-linearity, hysteresis and creep resistance, which have been resolved under closed-loop control.更多还原