【作者】 刘亚东； 唐健； 张卫平； 成宇翔； 陈文元；

【Author】 LIU Ya-dong;TANG Jian;ZHANG Wei-ping;CHENG Yu-xiang;CHEN Wen-yuan;National Key Laboratory of Science and Technology on Micro,Nano Fabrication Laboratory,Laboratory for Thin Film and Micro fabrication of the Ministry of Education,Shanghai Key Lab of Navigation and Location-based Services,Department of Micro-Nano Electronics,School of electronic information and electrical engineering,Shanghai Jiao Tong University;

【机构】 微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室上海市北斗导航与位置服务重点实验室上海交通大学电子信息与电气工程学院微纳电子学系；

【摘要】 综述了轴对称结构谐振微机电陀螺多种方案的最新研究进展,讨论了轴对称结构谐振微机电陀螺的几种结构,对其中的典型结构进行了方案设计,用有限元分析方法研究其驱动和检测的振型,并采用微纳加工技术实现了微陀螺谐振子的立体加工和信号电极的图形化,最后通过转台对陀螺样机进行了性能测试研究。得到的测试结果与微陀螺理论分析基本吻合,表明本文设计的几种轴对称谐振微陀螺在航空航天等领域具有很高的应用潜力。更多还原

【Abstract】 Several typical structures of the axial symmetry resonant MEMS gyroscope(ASRMG) are discussed.A variety of ASRMG schemes have been proposed.Using finite element analysis method,ASRMG’s driving mode and sensing mode have been analyzed,and the structures of ASRMG are designed.The ASRMG prototype and its signal electrodes have been fabricated by 3-Dimension micro-nanofabrication technology.Finally,the performance parameters of ASRMG have been tested.The test results agree well with the theoretical analysis.The test experiment demonstrates that ASRMG is high potential to be applied in aerospace field.更多还原