【作者】 储宜兴； 周斌； 刘云峰； 董景新；

【Author】 CHU Yi-xing;ZHOU Bin;LIU Yun-feng;DONG Jing-xin;State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instrument,Tsinghua University;

【机构】 清华大学精密仪器系精密测试技术及仪器国家重点实验室；

【摘要】 本文实现了一种低温漂MEMS传感器专用电荷泵芯片,该芯片可为闭环MEMS传感器系统提供稳定低温漂、幅值可调节的反馈电压。芯片中采用了三级2倍压Makowski电荷泵级联结构,利用闭环模块抑制纹波和温漂,并使用HHGRACE的BCD350GE高压工艺设计并流片。测试结果显示,电荷泵芯片在开环方式下,最大输出电压为25V,而10℃到60℃范围内有30m V的纹波和4.48%的温漂;在使用闭环控制模块形成闭环电荷泵系统后,输出电压稳定在10V,纹波降低到0.2m V,温漂减小到0.05%,大幅提高了电荷泵输出电压的稳定性。更多还原

【Abstract】 This paper presents a low thermal drift charge pump designed for MEMS sensors.The charge pump can provide amplitude variable feedback voltage for closed-loop MEMS sensor system with low thermal drift.Three-stage cascaded architecture of 2X Makowski charge pump is adopted.A closed-loop control module is used to suppress voltage ripple and the thermal drift.The whole chip is designed and fabricated using HHGRACE BCD350 GE high-voltage process.Test Results show the output voltage of the open-loop charge pump system can be as high as 25 V with 30 m V voltage ripple and 4.48% thermal drift from 10℃ to 60℃.Experimental results of the closed-loop charge pump system present a constant voltage of 10 V with 0.2m V voltage ripple,and 0.05% thermal drift,making a significant promotion in performance.更多还原