【作者】 黄德进； 蒋佳丽； 王骥；

【Author】 HUANG De-jin;JIANG Jia-li;WANG Ji;Department of Engineering Mechanics,Ningbo University;

【机构】 宁波大学工程力学系；

【摘要】 这篇文章研究了温度对压电薄膜谐振器(FBAR)拉伸模态下频率特性的影响。首先基于压电材料的压电弹性方程,推出FBAR在拉伸模态下的振动方程并设定其自由振动的边界条件。然后设定含有未知量的振动方程解的形式,通过边界条件确定其中的待定常数。得到了FBAR的串联和并联谐振频率,讨论了温度对FBAR的谐振频率,带宽和有效机电耦合系数的影响。文中给出了一个数值算例,显示了温度效应的影响。这个结果对FBAR的应用有一定的指导意义。更多还原

【Abstract】 This paper investigated the effects of temperature on resonance properties of Film Bulk Acoustic Resonator(FBAR) in thickness-stretch mode.Based on the fundamental piezo-elastic equations of piezoelectric material,the vibration equation of ideal FBAR under sine excitation voltage is derived.The solution is then obtained by using of the boundary conditions.The series and parallel resonance frequency are presented,and the effects of temperature on resonance frequency,bandwidth,and effective electromechanical coupling coefficient are discussed.A numerical example is presented to show the effects.These results are very useful for the improvement of designing FBAR.更多还原