【作者】 朱泽玮； 隋国荣；

【Author】 Zewei Zhu;Guorong Sui;College of Optics and Electron Information Engineering,University of Shanghai for Science and Technology;

【机构】 上海理工大学光电信息与计算机工程学院；

【摘要】 为了实现高精度的离焦检测,通过理论研究,确定了基于像散法的检测方式。设计了相应的光学系统,利用仿真软件对设计参数和关系进行了仿真,确定了影响探测精度、灵敏度以及干扰的因素,并设计了光学系统,对实现高精度像散法离焦检测产生指导和实际意义。更多还原

【Abstract】 In order to achieve high precision of defocus detection,through the theoretical research,the detection method based on astigmatic method.Design of optical system corresponding to the design parameters,and using simulation software simulation,factors affecting detection precision,sensitivity and interference have been determined,and the design of the optical system,the realization of high precision astigmatic defocus detection guidance and practical significance.更多还原