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高纯氧化铝陶瓷表面形貌对Mo-Mn法金属化封接强度的影响
Effect of Surface Morphology on the Sealing Strength of High Purity Al2O3 Ceramic by Molybdenum-Manganese Process
【Author】 SHANG A-man;GAO Ming;HUANG Yi-gong;ZHANG Ju-xian;Beijing Vacuum Electronics Research Institute;Vacuum Electronics National Laboratory;
【机构】 北京真空电子技术研究所； 大功率微波电真空器件技术国防科技重点实验室；
【摘要】 本文通过不同烧结温度制备出两种显微结构的高纯Al2O3陶瓷,采用四种不同的加工方式,制备出不同表面状态的高纯Al2O3陶瓷样品。利用轮廓仪测量样品表面粗糙度,并利用扫描电镜对其表面显微形貌进行分析。然后,将各种不同表面形貌的高纯Al2O3陶瓷进行高温Mo-Mn法金属化,并用Ag焊料进行封接。最后,测试出不同表面形貌的高纯Al2O3陶瓷金属化封接强度,进而研究高纯氧化铝陶瓷表面形貌对其Mo-Mn金属化封接强度的影响。结果发现,表面未加工高纯Al2O3陶瓷金属化封接强度高、一致性最好。
【Abstract】 In this paper,two kinds of high purity Al2O3 ceramics with different grain sizes were prepared at different sintering temperatures.High purity Al2O3samples with different surface morphology were obtained by surface-machining methods.The surface roughness was measured using profile testing instrument and the surface microstructure was analyzed by SEM.Then,alumina ceramics surfaces with different morphology were metallized respectively by active molybdenum-manganese process,and sealed with silver solder.Finally,the sealing strength was measured.The effect of different morphology on sealing strength for high purity Al2O3 ceramics was studied.The results showed that sealing strengthwas highest and moreover sealing quality was most stable for high purity Al2O3 ceramics without machined surfaces.
- 【会议录名称】 真空电子技术—陶瓷金属封接和真空电子与专用金属材料分会年会专辑
- 【会议时间】2013-07-01
- 【分类号】TN104.2