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低气压大体积等离子体发生及其电参数特性研究

Generation of Large-volume Plasma under Low Air-pressure and Study Of Its Electrical Characteristics

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【作者】 王秉哲刘振黄逸凡闫克平

【Author】 WANG Bingzhe;LIU Zhen;HUANG Yifan;YAN Keping;Key Laboratory of Biomass Chemical Engineering of Ministry of Education,Zhejiang University;College of Environmental and Resource Sciences,Zhejiang University;Department of Chemical and Biological Engineering,Zhejiang University;

【机构】 浙江大学生物质化工教育部重点实验室浙江大学环境与资源学院浙江大学化学工程与生物工程学系

【摘要】 低气压中的气体放电现象不同于常压下,可以在较低的气体温度和较小的电流下产生大面积的均匀等离子体,在材料处理、催化剂的活化和再生等领域有着很好的应用前景。本文在自制的真空反应器中采用平行板电极,在10-100 Pa的气压下,利用脉冲宽度小于50μs、峰值电压小于3 k V、频率50-104 Hz的双极性脉冲源,发生了最大体积约为20L的均匀等离子体。对放电时反应器的电压电流波形进行测试,获得在不同压强的空气、氧气、氩气介质,不同的电极间距下,放电的起始电压,以及空气中等离子体功率随气体压强、电极间距、极板面积、脉冲频率及电压峰值等不同参数变化的数量关系。

【Abstract】 Discharge phenomenon under low pressure is so different from that under atmospheric pressure, that uniform plasma of a rather large volume could be generated with a low media temperature and a low electric current. This kind of plasma has promising application prospects in areas like material processing, activation and regeneration of catalysts, and so on. In this paper, uniform plasma of a maximum volume of about 30 L is generated, using a bipolar pulsed power source(50-104 Hz, peak voltage less than 3 k V, pulse width less than 50 μs) and parallel plate electrodes, under pressure of 10-100 Pa, in a homemade vacuum reactor. Measurement of the time-varied voltage and current of the reactor during discharge has been undertaken, and we obtained the voltage starting a uniform discharge,also the relationship between power and parameters like pressure, electrode distance, electrode area, pulse frequency, etc., under several kinds of medium like air, oxygen, and argon.

【基金】 国家自然科学基金(11005091,21276232);中央高校基本科研业务费专项资金~~
  • 【会议录名称】 中国物理学会第十八届全国静电学术会议会议论文集——高压放电:从灾害防护到新技术应用
  • 【会议名称】中国物理学会第十八届全国静电学术会议
  • 【会议时间】2013-10-16
  • 【会议地点】中国福建厦门
  • 【分类号】O53
  • 【主办单位】中国物理学会静电专业委员会
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