【作者】 李雪； 唐恒敬； 邓洪海； 李建伟； 邵秀梅； 李淘； 危峻； 龚海梅；

【Author】 Li Xue;Tang Hengjing;Deng Honghai;Li Jianwei;Shao Xiumei;Li Tao;Wei Jun;Gong Haimei;State Key Laboratory of Transducer Technology, Shanghai Institute of Technical Physics,Chinese Academy of Sciences;Key Laboratory of Infrared Imaging Materials and Devices, Shanghai Institute of Technical Physics, Chinese Academy of Sciences;School of Electronics and Information, Nantong university;Shanghai Institute of Technical Physics, Chinese Academy of Sciences;

【机构】 中国科学院上海技术物理研究所传感技术联合国家重点实验室； 中国科学院上海技术物理研究所中科院红外成像材料与器件重点实验室； 南通大学电子信息学院； 中国科学院上海技术物理研究所；

【摘要】 高密度焦平面探测器的串音特性在光电仪器应用中备受关注,本文研究了近红外In Ga As探测器的串音特性。设计了中心距为30μm的32×32元面阵器件,采用激光束诱导电流技术(LBIC)研究了光敏区载流子的横向扩散及填充因子,结果表明通过优化相邻光敏元扩散隔离区的间距,在室温下器件填充因子可以达到98%,且相邻光敏元之间响应存在明显极小值;在器件结构设计及测试结果的基础上,研制了800×2元In Ga As焦平面探测器,其光电性能良好,串音效果有所改善,该组件应用于光电成像仪器,推算其MTF约为0.50,成像图片清晰。更多还原

【Abstract】 Crosstalk characteristics of high desity FPA detectors attract widespread attention in the application of optical apparatus. Crosstalk characteristics of near infrared In Ga As FPA detectors were studied in this paper. The 32×32 photodiodes with 30μm pitch were designed, and laser beam induced current technique(LBIC) was used to measure its lateral diffuse of the effective carriers and fill factor of photosensitive area. The results indicate that the fill factor of detectors can reach up to 98% when the diffuse spacer length is optimized, and the minimum response exists between two neighborhood pixels. Based on the design and crosstalk measurement results of the 32×32 photodiodes, the 800×2 linear planner type photodiodes were designed and thus the 800×2 FPA assembly was fabricated. The assembly shows thehigher photo-electrical performance and good crosstalk improvement. The assembly was applied in optical imaging apparatus and modulation transfer function of FPA assembly was deduced to 0.50. The sharp image based on FPA assembly was obtained.更多还原