Experiment,numerical and atomistic simulations on mechanical behaviors of single crystal silicon in nanoindentation tests

【作者】 张明福； 闫润泽； 刘洋； 王文均； 韩杰才；

【机构】 哈尔滨工业大学；

【摘要】 To investigate micro/nano mechanical behaviors and anisotropism of monocrystalline silicon,nanoindentation tests,finite element numerical simulation and the first-principle calculations are used to analyze elastic and plastic properties of single crystal silicon(100),(110) and(111) planes in nanoindentation.The influencing factors and experimental results in nanoindentation tests are discussed.The numerically simulated elastic recovery trends are in good agreement with the experiment data,meanwhile,the first-principles calculated lattice parameters,bond length and single crystal elastic parameters are not only in accordance with the reported data,but also showing the same brittle and anisotropy properties as the experiment displays..The results of stress distributions with FEM simulations explain the existence of semicircle crack sections and tiny cracks distribute along the radial direction inside the compressed areas.更多还原

【Abstract】 To investigate micro/nano mechanical behaviors and anisotropism of monocrystalline silicon,nanoindentation tests,finite element numerical simulation and the first-principle calculations are used to analyze elastic and plastic properties of single crystal silicon(100),(110) and(111) planes in nanoindentation.The influencing factors and experimental results in nanoindentation tests are discussed.The numerically simulated elastic recovery trends are in good agreement with the experiment data,meanwhile,the first-principles calculated lattice parameters,bond length and single crystal elastic parameters are not only in accordance with the reported data,but also showing the same brittle and anisotropy properties as the experiment displays..The results of stress distributions with FEM simulations explain the existence of semicircle crack sections and tiny cracks distribute along the radial direction inside the compressed areas.更多还原