【作者】 陈伟； 伍凡；

【Author】 CHEN Wei1,WU Fan2 (1.School of Communication and Information Engineering, Xi’an University of Science and Technology, Xi’an 710054, China; 2.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209,China)

【机构】 西安科技大学通信与信息工程学院； 中国科学院光电技术研究所；

【摘要】 在光学元件的抛光阶段,通常采用干涉仪检测光学元件的面形数据,对加工工作提供指导意见。移相干涉术易受环境振动的干扰,获得的波前相位的干涉图信息不完整,难以准确给出光学元件表面的干涉数据。为了利用干涉仪检测数据给出被测光学元件面形上的各点准确数据,采用等精度测量消除随机误差的方法,对多次检测数据求取平均值以获取被测光学元件面形的准确数据。针对一块Φ1200mm口径的圆形光学元件的实验表明这种方法可以较为有效地消除检测中振动因素的影响。更多还原

【Abstract】 As a rule, Interferometers are used to test the figure in the polishing phase of optical component, it could provide advance tutor suggestion for manufacturing. It is unable to get the whole wave-front interferogram usually because phase-shift Interferometry is sensitive to environment vibration, so the exactly interference data of the optical surface could not be obtained. Various spatial point on the tested optical component will be given by calculation method about arithmetic average value of equal precision is provied. This paper describes the testing results of optical components in size Φ1 200 mm, it is proved the method could eliminate the vibration effectively.更多还原