【作者】 付志凯； 张健； 吴丽莹；

【Author】 FU Zhi-kai, ZHANG Jian, WU Li-ying (Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150001, China)

【机构】 哈尔滨工业大学超精密光电仪器工程研究所；

【摘要】 介绍了横向塞曼效应He-Ne激光器的磁场设定、信号获取、利用半导体制冷(TEC)的主从控制稳定频率的技术。阐述了由程控倍频模块和双通道缓冲连续计数模块组成的电子细分电路,实现可用按键设定2、4、8、16四种计数脉冲细分系数,以获取不同干涉测量分辨力。实验得出了横向塞曼稳频激光器的频率稳定度为1.74×10-9,稳频时激光管温度为43℃,克服了加热稳频法激光管温度过高、不易散热以及风扇风冷法激光频率短期稳定度低的缺点。系统具有0.16、0.08、0.04、0.02μm四种测量分辨力。更多还原

【Abstract】 The technology of magnetic field set up, signal acquisition, frequency stabilization with thermoelectric cooler (TEC) using master and slave control loop of transverse Zeeman He-Ne laser is introduced. The interference subdivision electronics composed of programmable frequency multiplier module and dual-channel continuous buffer counter module is presented, which may be set to acquire four pulse count subdivision factors of 2, 4, 6 and 16 by using buttons, which means four different measuring resolutions. Experiment results show that the frequency stability of the frequency stabilized transverse Zeeman He-Ne laser is 1.74×10-9, the temperature of the laser tube is 43 ℃. This laser avoids both the shortcomings of high temperature produced by heating stabilization method and the low short term stability of fan cool method. The interferometer has four measurement resolution, they are 0.16 μm, 0.08 μm, 0.04 μm and 0.02 μm respectively.更多还原