【作者】 杨文志； 景洪伟； 曹学东； 吴时彬；

【Author】 YANG Wen-zhi, JING Hong-wei, CAO Xue-dong, WU Shi-bin (Institute of Optics and Electronics ,Chinese Academy of Sciences, Chengdu 610209, China)

【机构】 中国科学院光电技术研究所；

【摘要】 针对大型环形平面尤其是非连续平面(带孔、有槽、中间有凸台子、中间间断、异形平面)平面度的检测,研制了一种新型测量设备—激光平面度仪。该仪器采用了激器、五棱镜与转台组合产生基准平面,以PSD作为探测器;通过测量被测点与基准面的高度差获取平面度数据。该仪器的测量不确度为4.6μm。更多还原

【Abstract】 The laser flatness instrument,a new flatness measurement device, is reported.This measurement device is very useful for the large annular planes especially non-continuous planes,for example planes with holes,planes with slots,planes with bosses,planes with intervals,odd-form planes.The standard plane is generated using laser,pentaprism and rotary table ,and the detector is PSD.The flatness information is got by measuring the discrepancies of the measuring points and standard plane.The measurement uncertainty of the device is 4.6 μm.更多还原