【作者】 张洪鑫； 张健； 吴丽莹；

【Author】 ZHANG Hong-xin1,2, ZHANG Jian1, WU Li-ying1 (1.Institute of Ultra-Precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150008, China; 2.Department of Mechanical and Electrical Engineering, Harbin University of Science and Technology, Harbin 150080, China)

【机构】 哈尔滨工业大学超精密光电仪器工程研究所； 哈尔滨理工大学机械动力工程学院；

【摘要】 研究了利用液晶空间光调制器的相位调制特性进行光学测量的方法。测试美国BNS公司反射式256×256纯相位液晶空间光调制器,相位响应呈非线性。利用反插值法对非线性相位响应进行了校正,使非线性度缩小1/8,获得了该器件线性的相位响应曲线。利用液晶空间光调制器产生相息图,能够将PV值为0.78λ,均方根为0.13λ的不规则波面,调制成PV值为0.27λ,均方根为0.02λ的近似平面波。实验结果表明,液晶空间光调制器作为补偿器能够应用于任意光学表面的测量。更多还原

【Abstract】 The method of optical measurement using the phase characteristics of liquid crystal spatial light modulator is discussed. The reflecting phase-only liquid crystal spatial light modulator from American BNS company is measured and the phase response is nonlinear. The phase nonlinearity reduces to 1/8 by inverse interpolation and the linear phase response curve is obtained. The Kinoform from this device is used to modulate the arbitrary wavefront which PV is 0.78 λ and RMS is 0.13 λ to approximate plane wavefront which PV is 0.27 λ and RMS is 0.02 λ. The experimental results show that the liquid crystal spatial light modulator can be used to measure the arbitrary optical surface.更多还原