【作者】 易亨瑜； 胡晓阳； 陈门雪； 王文东； 郑为民；

【Author】 YI Heng-yu, HU Xiao-yang, Chen Men-xue, WANG Wen-dong, ZHENG Wei-min (Institute of Applied Electronic,CAEP, Mianyang 621900, China)

【机构】 中国工程物理院应用电子学研究所；

【摘要】 对于高精度加工,工件的微小面形偏差的精确测量非常重要。比较了微小面形的两类光学测量仪器,重点介绍了瞬态干涉测量方法。分析了干涉测试中相位展开方式,并将其应用于工件面形的测量中,用单张干涉图实现干涉波前的恢复,获取工件的面形信息。利用GLAD软件进行仿真,模拟了干涉仪对工件面形测量得到的波面干涉条纹图,并利用相位展开方法,读入干涉图样,进行工件的面形重构,获得了初步的仿真测量结果。对比了波面重构前后的工件面形,分析了重构面形失真的原因。更多还原

【Abstract】 Exact measurement of workpieces′ surface is very important to Precise machining. Two kinds of measurement instrument are compared, and transient interferometry is stressed. A phase unwrapping method is introduced for measurement of workpieces′ surface, and is applied to reconstruct the surface of those elements basing on one interferogram. The method used in coherence measurement is based on Furrier transform. The interference pattern is produced by GLAD software. The recon-struction result is acquired and compared to the original surface of optical elements, and the difference is analyzed.更多还原