【作者】 程敏熙； 何振江； 黄佐华；

【Author】 CHENG Min-xi, HE Zhen-jiang, HUANG Zuo-hua (School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, China)

【机构】 华南师范大学物理与电信工程学院；

【摘要】 斯托克斯参量可全面描述光束的偏振态,分析了偏振光的斯托克斯参量的意义及其测量方法。通过测量纳米级薄膜样品的入射和反射偏振光的斯托克斯参量,求得椭偏参量ψ和?,然后求得薄膜样品的厚度和折射率。实验表明,该方法适用于任何偏振态的入射和反射偏振光,测量系统构建较容易,测量结果与目前常用的椭偏消光法接近。更多还原

【Abstract】 Polarized light can be described completely by Stokes Parameters. The physical significance of Stokes Parameters and their testing method are studied. The ellipsometry parameters (ψ, ?) of a nano-meter film can be measured by testing the Stokes Parameters of incidence and reflection light. Then the thickness and refractive index of the sample can be obtained. The experiment shows that this method is suitable to any polarized state of incidence and reflection light, the experimental system can be set up easily, the tested results is close to the one from the ellipsometer with extinction.更多还原