【作者】 何玉琳； 章海军； 张东仙； 黄峰；

【Author】 He Yulin, ZHANG Hai-Jun, ZHANG Dong-xian, Huang Feng (State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou, 310027)

【机构】 浙江大学现代光学仪器国家重点实验室；

【摘要】 本文简要介绍了利用光热膨胀工作的微型驱动器的原理。这种驱动器由一个膨胀臂,一个支撑臂和一个移动滑块组成。当膨胀臂被激光加热时迅速伸长,由于自身的惯性,移动滑块基本上保持静止。停止加热后,膨胀臂缓慢收缩,并利用摩擦力驱动滑块移动。周期性的重复这个加热冷却的过程,驱动器就能够持续的进行步长在微纳米量级的步进运动。我们首先从理论上研究了膨胀臂的膨胀收缩模式,并推导了一些公式,然后利用原子力显微镜测得了其膨胀波形。实验结果表明, 理论预测和实验结果能够基本吻合,而光热膨胀的波形也满足了实现微型驱动器的要求。更多还原

【Abstract】 This article briefly presents a new idea of micro-drivers based on photo-thermal expansion. This kind of micro-driver consists of an expansion arm, a support arm and a motion block on the support arm. While being heated by a laser beam, expansion arm extends rapidly, and the motion block remains still due to its own inertial. When heating beam is shut off, expansion arm shrinks slowly and makes the block move along with it for a tiny step. Irradiated by a periodic laser, the block is able to move step by step in micro/nanometer order. We first study expansion and contracting mode of expansion arm in theory, and deduce some approximate formulas. Then its expansion waveform is observed and traced with an atomic force microscope (AFM) system. Experiments show that our theoretical predicts match experiment results well and the variable regularity of expansion satisfies the requirements of micro-driver.更多还原