【作者】 周祎； 马胜歌； 康光宇； 耿漫；

【Author】 ZHOU Yi MA Sheng-Ge KANG Guang-Yu GENG Man (ShenZhen 863 Program Research and Development Center For Surface Technology,Shenzhen 518029,China)

【机构】 深圳八六三计划材料表面技术研发中心；

【摘要】 采用激光拉曼光谱、轮廓仪、色差仪、微纳米力学综合测试系统、摩擦磨损试验机等设备,对霍尔离子源辅助中频非平衡磁控溅射制备的不同掺氮量的类金刚石薄膜的微观结构及其宏观性能进行了研究。结果表明,随着氩气/氮气流量比的增加,薄膜中的 sp~3含量出现极大值, 极大值两侧对应着不同的微观机制。同时,薄膜的沉积速率逐渐降低,硬度与弹性模量呈现出先增大后减小,摩擦系数呈现出先减小后增大的变化趋势。薄膜的颜色主要是黑色并随着氮气含量的增加逐渐变红。更多还原

【Abstract】 The microstructure and macro-properties of diamond like carbon films with different nitrogen content were studied with the help of Raman,Surface Profilometer,Spectrophotometer,Continuous stiffness method,Triometer tester.The experiment result shows,the sp³ content in the films have a Maximum as the ratio of Ar and N₂ increase,on both sides of the Maximum Corresponding different micro-mechanism.Meanwhile,the deposition rate of the films gradually decrease,hardness and Young’s modulus firstly increase and decrease later,the friction coefficient of the films firstly decrease and then increase as he ratio of Ar and N₂ increase.The color of the films is black mainly,then gradually turn red as the nitrogen increase.更多还原