【作者】 刘坤； 巴德纯； 杨乃恒； 常学森； 李涛； 陈瑶；

【Author】 Liu Kun, Ba Dechun, Yang Naiheng, Chang Xuesen, Li Tao, Chen Yao (Northeastern University, Shenyang 11004, China )

【机构】 东北大学真空与流体工程研究中心；

【摘要】 为了降低半导体设备中的真空系统的成本、实现高真空获得设备的清洁化、简单化和微型化,人们一直在寻求能达到高真空并且直排大气的干式真空泵。近几年,国外已经出现了仅用一台泵就可以实现从高真空到大气的全部抽气过程的高真空直排大气干泵,并实现了商业化,已经应用于实际生产中。本文以其中具有代表性的英国BOC Edwards公司的EPX干泵和德国Pfeiffer Vacuum公司的OnTool干泵为例,简单介绍了其原理、结构、性能,为国内从事真空应用和干泵研发人员提供参考。更多还原

【Abstract】 In order to reduce the cost of vacuum system in semiconductor equipments and realize clean, simple and microscale vacuum acquirement systems, people are always seeking for a kind of high vacuum pump which could discharge directly into atmosphere. In recent years, several kinds of dry vacuum pump were successfully invented and applied in industry which can pump gas from high vacuum pump directly into atmosphere by a single pump. This paper briefly introduced the pumping mechanism, construction and performance of two kinds of dry vacuum pump pumping from high vacuum directly into atmosphere, that is, the EPX dry pump of BOC Edwards company in Britain and OnTool dry pump of Pfeiffer Vacuum Gmbh in German, which can be referred by scholars or technical engineers.更多还原