【作者】 周洪军； 钟鹏飞； 霍同林； 郑津津； 张国斌；

【Author】 Zhou Hongjun~(1*) Zhong Pengfei~2 Huo Tonglin~1 Zheng Jinjin~2 Zhang Guobin~1 (1.National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China; 2.Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230027,China)

【机构】 中国科学技术大学国家同步辐射实验室； 中国科学技术大学精密机械与精密仪器系；

【摘要】 利用自行研制的真空清洗装置连接到同步辐射光束线上开展了同步辐射光活化氧清洗碳污染光学元件的研究。引入同步辐射光到冲入氧气的清洗真空室,使氧气电离而生成臭氧。臭氧具有很强的氧化性。光学元件表面的碳污染物在同步辐射光和臭氧的共同作用下,发生化学反应,生成 CO₂等气态物质。CO₂等通过真空泵抽除,进而达到清洗的目的。文中给出了实验结果。更多还原

【Abstract】 A novel decontamination technique has been successfully developed,with oxygen activated by synchrotron radiation(SR),to clean carbon-contaminated film surfaces of optical components.The SR beam-line was used to activate the pure oxygen,filled into the lab-built vacuum chamber,into ozone molecules.The chemical reactions,induced by SR irradiation and ozone oxidation,turn carbon contaminates on the surface into carbon dioxide,which can be pumped out easily.Carbon free optical components have been obtained with the newly-developed technique.更多还原