【作者】 王勇； 张耀锋； 尉伟； 范乐； 王建平； 耿会平；

【Author】 Wang Yong, Zhang Yaofeng, Wei Wei, Fan Le, Wang Jianping, Geng Huiping National Synchrotron Radiation Laboratory Anhui Hefei 230029

【机构】 国家同步辐射实验室；

【摘要】 本文简要叙述了小孔流量法测量材料出气率实验的原理和实验装置,给出了不锈钢溅射镀 TiN膜在不同情况下的热出气率,并对影响不锈钢溅射镀TiN膜热出气率情况的各种因素进行了分析,为使用溅射镀TiN膜表面处理的储存环真空室的设计提供了依据。更多还原

【Abstract】 In this paper, the principle and experimental equipment to measure thermal outgassing rate by thought put method have been described, and then the outgassing rate of the stainless steel sputter TiN coating at the different condition have been given. All the parameters that influence the outgassing rate of the stainless steel sputter TiN coating were analyzed and the results will provide some experimental basis for the vacuum chambers of storage ring design.更多还原