【作者】 王勇； 张耀锋； 尉伟； 王建平； 范乐； 蒋道满； 朱存宝；

【Author】 Wang Yong Zhang Yaofeng Wei Wei Wang Jianping Fan Le Jiang Daoman Zhu Cunbao National Synchrotron Radiation laboratory, University of Science and Technology of China Hefei, Anhui 230029

【机构】 中国科学技术大学国家同步辐射实验室；

【摘要】 本文详细介绍了一种适用于加速器细长管道真空室的低温镀TiN薄膜的表面处理技术。在不锈钢管道溅射镀膜装置上,通过对ф86×2000mm的不锈钢管道真空室进行溅射镀TiN膜的反复多次实验及对镀膜实验结果的分析,得到了一整套适用于加速器管道真空室内壁溅射镀TiN膜的表面处理参数。样品测试结果表明,在压强为80-90Pa、基体温度为160-180℃的镀膜参数下,不锈钢管道内壁能获得高品质的、均匀的TiN薄膜。更多还原

【Abstract】 A surface treatment technology of coating the inner face of stainless steel pipe vacuum chamber for accelerators with TiN film in low temperature will be described in detail in this paper. A series of surface treatment parameters have been achieved through many coating experiments on a stainless steel pipe which is 86 mm in diameter and 2000 mm in length and the analysis of the experiment results in the setup for coating stainless steel pipe by sputtering in low temperature. The test results of the samples show that TiN film of very good quality could be coated on the inner face of stainless steel pipe under the parameters that is 8.0×10-1-9.0×10-1 mbar in pressure and 160-180℃ for stainless steel pipe in temperature.更多还原