【作者】 孙剑； 杨天鹏； 白亦真； 徐艺滨； 王新胜； 杜国同；

【Author】 Sun Jian,Yang Tianpeng, Bai Yizhen ,Xu Yibin,Wang Xinsheng and Du Guotong State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian, 116024, China; Department of Physics, Dalian University of Technology, Dalian, 116024, China; College of Electronic Science and Engineering, State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun, 130023, China

【机构】 大连理工大学三束材料改性国家重点实验室物理系； 吉林大学集成光电子国家重点实验室电子科学与工程学院； 大连理工大学物理系；

【摘要】 ZnO/金刚石结构的表面声学波滤波器的性能主要取决于沉积ZnO薄膜的质量。本文用金属有机化合物气相沉积两步生长法在自持化学气相沉积金刚石厚膜的成核面上制备了ZnO薄膜,并用X射线衍射谱,扫描电子显微镜和室温光荧光谱对薄膜质量进行了表征。结果表明得到的ZnO薄膜取向一致,表面较均匀,光学质量良好。更多还原

【Abstract】 ZnO films were grown in two steps by metal organic chemical vapor deposition on grain facets of thick diamond films, which were synthesized on molybdenum plate by chemical vapor deposition.The ZnO films were characterized with X-ray diffraction,scanning electron microscopy and photoluminescence spectroscopy.The results show that c-axis is the preferential growth orientation of the smooth,compact ZnO films with good optical properties.更多还原