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氮分压对电弧离子镀CrN_x薄膜结构与性能的影响
Influence of Nitrogen Partial Pressure on Microstructures and Properties of CrN_x Coatings Deposited by Arc Ion Plating
【Author】 Zhong Bin,Gou Wei,Li Guoqing ,Hu Yuanrong,Liu Zhendong State Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian, 116024, China
【机构】 大连理工大学三束材料改性国家重点实验室;
【摘要】 采用电弧离子镀技术,在不同N2分压下沉积Cr/CrNx薄膜。X射线衍射技术、努氏硬度计和UMT型球-盘摩擦试验机、M342-2型腐蚀测量系统分别测试了薄膜相结构、显微硬度、摩擦磨损和抗腐蚀性能。研究了N2分压对薄膜相组成、硬度、摩擦磨损和抗腐蚀性能的影响。结果表明:随着N2分压的升高,薄膜由Cr2N(211)相过渡到CrN(220)相;薄膜硬度出现两个极值,对应于单相Cr2N和CrN;与钢基体相比,N2分压为0.35 Pa时制备的CrNx薄膜具有良好的耐磨性能和抗腐蚀性能。
【Abstract】 A series of Cr/CrNx films were deposited on steel substrates by arc ion plating at different nitrogen partial pressures.The mi-crostructures and mechanical properties were characterized with X-ray diffraction(XRD)and conventional mechanical measurements. The results show that nitrogen partial pressure significantly affects the mechanical properties. For instance,as N2 partial pressure increases, variations in the change of preferential growth orientation from Cr2N(211)to CrN(220) result in two hardness peaks, corresponding to the phases of Cr2N and CrN, respectively. CrNx films were found to have higher wear resistance than steel and better corrosion resistance than Cr films.
【Key words】 Cr/CrNx coating; Arc ion plating; Microhardness; Eear property; Corrosion resistance;
- 【会议录名称】 全国薄膜技术学术研讨会论文集
- 【会议名称】全国薄膜技术学术研讨会
- 【会议时间】2006-09
- 【会议地点】中国北京
- 【分类号】TB43
- 【主办单位】中国真空学会