【作者】 王明霞； 张晶晶； 杨瑾； 刘谦祥； 李德军；

【Author】 Wang Mingxia,Zhang Jingjing, Yang Jin,Liu Qianxiang and Li Dejun College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin, 300074, China

【机构】 天津师范大学物理与电子信息学院；

【摘要】 选择Zr和W的氮化物作为个体层材料,利用FJKS60CI2型超高真空射频磁控与离子束联合溅射系统制备ZrN,WN 及一系列的ZnN／WN多层薄膜。通过X射线衍射仪,俄歇电子能谱和纳米力学测试系统分析了该体系合成中Ar／N2气体比例对多层膜结构与机械性能的影响。结果表明:多层膜的纳米硬度值普遍高于两种个体材料混合相的硬度值;当流量比 FAr:FN2=5时W2N的(111)峰加强并出现(200)峰,结晶出现多元化,多层膜体系的硬度、应力、弹性模量以及膜基结合性能均达到最佳效果。更多还原

【Abstract】 ZrN/WN multilayers, grown by RF reactive magnetron sputtering and by ion beam sputtering, were characterized with X-ray diffraction, Auger electron spectroscopy and indentation, etc. The results show that the film hardness is usually higher than that of the mixture of monolithic ZrN and WN coatings,and that the argon nitrogen ratio in the gas flow significantly affects its mechanical properties. At an Ar/N2 ratio of 5, W2N(111) peak becomes stronger, accompanied with(200) peak. Moreover, the mechanical properties, including hardness, internal stress,elastic modulus,fracture resistance and interfacial adhesion,reach the optimized values.更多还原