【作者】 胡小锋； 薛亦渝； 郭爱云；

【Author】 Hu Xiao-feng, Xue Yi-yu, Guo Ai-yun (Wuhan university of technology, Wuhan, 430070)

【机构】 武汉理工大学；

【摘要】 采用离子辅助沉积的方法,分别以Ti02和Ti305为初始膜料在K9玻璃上制备了氧化钛薄膜,并研究了离子束流密度对以Ti305为膜料制备的薄膜透射性能的影响。实验结果表明,热处理前薄膜都为无定形结构:热处理后有明显的锐钛矿结构(101)择优取向,以Ti305为初始膜料制备的薄膜吸收优于以Ti02为膜料制备的薄膜:薄膜透射率极值随束流密度增大有临界值。更多还原

【Abstract】 The oxide-titanium films were deposited by ion-beam assisted (IAD) on K9 glasses with the TiO2 and Ti3O5 coating matenals. The effects of the ion-current intensity to the transmissivity of the films deposited by Ti3O5 were also studied . The results of the tests showed that before annealed the two films were all undefined structure and after were showed (101) preferred orientation of the anatase structure. The refraction index (n) of the film which deposited by Ti3O5 coating materials was higher than the TiO2 coating materials. As the ion-current intensity growed, the transmissivity of the film growed too, but this grown has an critical nunmber.更多还原