【作者】 周慧； 肖国珍； 李争显； 杜继红； 黄春良；

【Author】 ZHOU Hui, XIAO Guo-zhen, Li Zheng-xian, Du Ji-hong, HUANG Chun-liang (Northwestern Institute for Nonferrous Metal Research, Xi’an, 710016, China)

【机构】 西北有色金属研究院；

【摘要】 氮化钛涂层因具有良好的耐蚀性、耐磨性及低的摩擦系数在工业上得到广泛应用。本文研究了采用离子镀技术在GCr15合金表面制备氮化钛涂层的工艺,通过研究获得了该合金有效的镀前清洗工艺,使用该工艺可以使合金基体获得很高的表面清洁度,从而提高了涂层与基体的结合力。由于氮化钛涂层与基体GCr15合金之间的热膨胀系数存在较大差异而造成的残余应力,会导致裂纹的产生,在本研究中通过在合金表面加镀一层纯钛作为过渡层,有效的降低了残余应力的影响,本文分析了镀膜工艺参数:氮气的分压力、负偏压、沉积时间及沉积温度,与氮化钛涂层性能之间的关系。通过合理的工艺参数控制,最终在GCr15合金表面制备出具有良好结合力和耐磨性的氮化钛涂层。更多还原

【Abstract】 Titanium nitride coating has great application in industry owing to its superior properties, such as good wear and corrosion resistance, low friction coefficient and good thermal barrier properties. In the paper, the preparation of TiN hard coatings on GCr15 alloy substrate via a hollow cathode discharge ion-plating technique was studied. The research has developed an effective washing process. It can provide very high surface cleanliness for the GGr15 alloy substrate. This can greatly increase the adhesion strength of TiN coatings. The residual stresses, resulted from the large difference in thermal expansion coefficient between coating and substrate, can cause cracks in TiN coatings. Through depositing a Ti interlayer on GGr15 substrate, the effect of residual stresses can be greatly reduced. The relationship between ion-plating parameters, such as the partial pressure of nitrogen, bias voltage, deposition time and temperature, and the properties of TiN coatings was analysized. Through proper control of the process parameters, TiN coatings with good adhesion strength and wear resistance have been prepared on GGr15 alloy substrate.更多还原