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用扫描隧道显微镜制备纳米尺度的规则结构

Regular Nanostructures Fabricated With Scanning Tunneling Microscope

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【作者】 古乾军刘宁赵文斌马自立薛增泉庞世瑾

【Author】 Q.J.Gu, N.Liu, W.B.Zhao, Z.L.Ma, Z.Q.Xue, and S.J.Pang( Beijing Laboratory of Vacuum Physics , Chinese Academy of Science, Beijing, 100080)

【机构】 中国科学院北京真空物理实验室

【摘要】 由于可在室温下从Si(111)7×7表面逐个提取原子,扫描隧道显微镜(STM)已被用于构造几个纳米宽的沟槽。当这种表面改形的取向与Si(111)7×7表面晶格基矢方向平行时,形成的沟槽将具有愿子级平直的边缘,横向宽度仅为一个7×7晶胞。测量了不同偏压下用于制备沟槽的临界电流。还根据实验数据讨论了这种表面改形的机理。

【Abstract】 The scanning tunneling microscope (STM) has been used to fabricated grooves a few nm wide at room temperature by extracting atoms one by one from the Si (111) 7×7 surfaces. When the direction of modification is parallel to the basic vector of Si (111) 7×7 surfaces, grooves formed by such a process have atomically straight edges and lateral features as small as one 7×7 unit cell wide. The critical current under various bias voltages for fabricating grooves is measured. Based on the experiment data, the modification mechanism is discussed.

  • 【会议录名称】 中国真空学会科技进步奖(1994-2000)得奖人员论文集
  • 【会议时间】2000
  • 【分类号】TB383
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