【作者】 冯武卫； 孟庆丰； 谢友柏； 范虹；

【Author】 Feng Wuwei Meng Qingfeng Fan Hong Xie Youbo (Theory of Lubrication and Bearing Institute,Xi’an Jiaotong University,Xian 710049,China)

【机构】 西安交通大学润滑理论及轴承研究所；

【摘要】 提出了一种利用超声引线键合系统阻抗的变化来识别键合强度的在线质量检测方法.基于采集到的换能器在键合过程中输入的电压和电流信号,利用Hilbert变换,计算得到其键合过程中阻抗的变化.通过对大量键合点进行阻抗监测和强度测试,发现链合点的强度与其键合过程中阻抗的变化有明显的关系.利用神经网络方法对键合过程中系统阻抗的变化进行分类和识别,估算的键合强度与实测数据基本吻合.键合过程中系统阻抗的变化可以作为键合点键合质量监测的指示器.研究结果为超声引线键合在线质量监测提供了一条新途径.更多还原

【Abstract】 A new method is putted forward to monitor online wire bonding quality through monitoring the change of system input electrical impedance.The signals of voltage and current of ultrasonic piezoelectric driver are transformed analytic signals by Hilbert transform.Using these analytic signals,the input electrical impedance is acquired.There are significant changes in the system input electrical impedance.Good correlation is found between the change in system input electrical impedance and the bonding intensity.A neural network module is constructed to classify and identify bonding quality.The results evaluated are uniform basically with the destructed shear test experiment.Bonding process drift towards unacceptable bond quality can be identified.The work will be used to develop a real-time monitoring system for ultrasonic wire bonding.更多还原