节点文献
Kovar合金注射成形技术的研究
Research on Powder Injection Molding of Kovar Alloy
【Author】 QIN Ming-li, QU Xuan-hui, LUO Tie-gang, Duan Bo-hua( School of Materials Science and Engineering, University of Science and Technology of Beijing, Beijing 100083, China ; The State Key Laboratory for Powder Metallurgy, Central South University, Changsha 410083, China)
【机构】 北京科技大学材料科学与工程学院; 中南大学粉末冶金国家重点实验室;
【摘要】 以Fe粉、Ni粉和Co粉为原料,研究了利用注射成形技术生产Kovar合金封装盒体的工艺。选择了一种蜡基多聚物粘结剂体系,在粉末装载量为58%时,喂料的最佳注射参数是:温度160-170℃,压力90-120 MPa。以喂料的热分析结果为指导,制定出合理的热脱脂工艺,对于6 mm×6 mm×50 mm的注射坯,总共脱脂时间约为18 h。将脱脂坯在1300℃烧结后,材料的致密度可达8.06 g·cm-3,热膨胀系数在(4.5-6.0)×10-6K-1之间(25-450℃),所制备的封装盒体的气密性小于1.2×10-9Pa·m3·s-1。
【Abstract】 Package boxes of Kovar alloy were fabricated by powder injection molding process starting with powders of Fe, Ni, Co, and a wax-based polymer was selected as binders. When the powder loading was 58% (volume fraction) , the optimal injection parameters were: injection temperature 160- 170℃, injection pressure 90-120 MPa. Based on the thermal analysis of the feedings, a suitable thermal decomposing process was set up. The whole decomposing process needed about 18 hours for 6 mm×6 mm×50 mm green bars. After being sintered at 1300℃ for 2 hours, the boxes with density of 8.06 g/cm3, average thermal expansion coefficient of (4.5-6.0)×10-6 K-1 (25-450℃), leakage rate lower than 1.2×10-9 Pa·m3·s-1 could be produced.
【Key words】 Kovar alloy; Powder injection molding; Thermal expansion coefficient; Leakage rate;
- 【会议录名称】 特种陶瓷及金属封接技术基础和应用研讨会论文集
- 【会议名称】特种陶瓷及金属封接技术基础和应用研讨会
- 【会议时间】2005
- 【会议地点】中国厦门
- 【分类号】TN105
- 【主办单位】中电科技集团公司第12研究所、《真空电子技术》杂志社