【作者】 王婷；

【Author】 Wang Ting(University of Shanghai for Science and Technology, Shanghai 200093, China)

【机构】 上海理工大学；

【摘要】 随着纳米技术的迅速发展,以及其被广泛的应用于多种学科的国际前沿研究,纳米测量技术也变的越来越重要,显示出其举足轻重的地位。设计了基于光纤内反射效应的精密角位移测量方法,对其进行了理论分析。分析结果显示,测量的精度以及测量范围取决于入射光的偏振态,初始入射角以及反射次数。更多还原

【Abstract】 With the development of modern technology of micro-millimeter, the technology of micro-millimeter has been extensively applied in many areas of the former studies. The technology of micro-millimeter measurement has become more and more important. A way that based on the internal-reflection effect is designed to measure the angular displacement. Through the discussion of the measurement method, it gets the result that the resolution and measurement rang are determined by the initial angle of incidence, the polarization state of the light, and the number of reflections.更多还原