【作者】 赵大鹏； 王亮； 李玉和； 李庆祥； 訾艳阳；

【Author】 Zhao Dapeng Wang Liang Li Yuhe Li Qingxiang Zi Yanyang (State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua Univ. , Beijing 100084,China)

【机构】 清华大学精密测试技术及仪器国家重点实验室；

【摘要】 采用多波长干涉光强比对法实时测量近场光存储头盘间距,其分辨率小于1nm。该方法通过改变柔性折臂的加载力,预先标定光强与近场间距的关系曲线,然后采集工作过程中测量点的干涉光强与关系曲线比对,获得头盘间距值。该方法需考虑近场光学飞行头表面相移对测量结果的影响。更多还原

【Abstract】 A real-time measurement of head-disk spacing is presented, and its distinguishability can be less than 1 nm. An intensity antitheses of multiple-beam interference is proposed. By changing the loading force of the flexible suspension, a calibration relation of head-disk spacing with respect to light intensity can be generated. During the procedure of disk rotating, the interference intensity is expressed by image gradation with CCD, and then the spacing is achieved by contrasting the measurement result with the calibration relation. The phase shift casued by complex refraction index of the optical flying head should be considered. The method can be used to real-time measure the dynamic head-disk spacing.更多还原