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激光量热法测量红外光学薄膜吸收

Laser calorimeter for IR absorption measurement of thin films

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【作者】 刘志国熊胜明张云洞

【Author】 LIU ZHi-guo,XIONG SHeng-ming,ZHANG Yun-dong (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China)

【机构】 中国科学院光电技术研究所

【摘要】 建立了一种评价波长为1.319μm光学薄膜的吸收损耗的吸收测量系统。采用激光量热计方法的原因在于:它已被广泛用来测量光学薄膜吸收,并且有很高的可靠性。描述了激光量热计法测量吸收装置的设计和建立,并给出基底—薄膜整体吸收的测量结果和记录的温度曲线,最后提出了在研究激光量热计测量方法中几个要考虑的问题。

【Abstract】 An absorptance measurement system has been developed for evaluation of the absorption loss of optical coatings at λ=1.319μm(YAG laser).Calorimetry was adopted as the measurement method because of its widely used to measure thin film optical absorption and its high reliability.The design and construction of laser calorimeter have been discribed. The result of the total film-substrate system absorptance and the recorded temperature-curve have been presented in this paper. At the same time ,Serval questions of the calorimetric measurement have been presented 

【关键词】 吸收比量热YAG激光薄膜
【Key words】 absorptancecalorimetryYAG laserthin film
  • 【会议录名称】 2004年光学仪器研讨会论文集
  • 【会议名称】2004年光学仪器研讨会
  • 【会议时间】2004
  • 【分类号】O484.4
  • 【主办单位】中国仪器仪表学会
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