【作者】 王风丽； 张众； 吴文娟； 王利； 王占山； 秦树基； 陈玲燕；

【Author】 WANG Feng-li, ZHANG Zhong, WU Wen-juan, WANG Li, WANG ZHan-shan,Qin SHu-ji,CHEN Ling-yan (Institute of Precision Optical Engineering,Tongji University, Shanghai 200092, China)

【机构】 同济大学精密光学工程技术研究所；

【摘要】 介绍了一种可用于X射线成像望远镜中的高能X射线反射元件的设计和制备。结合Spiller和Yamamoto方法选择了W、C作为膜层材料,用Yamshita设计方法给出初始膜系,经单纯形调优算法设计出掠入射角为8.7mrad时,对波长范围在0.0475nm～0.0886nm范围内的X射线计算反射率达21%宽波段X射线超反射镜。样品采用高精度磁控溅射方法制备,并用X射线衍射仪(XRD)测得在8.7mrad～15.7mrad内反射率为15%左右。更多还原

【Abstract】 Design and fabrication of the X-ray supermirror have been proposed, which is used as the high mirror in X-ray imaging telescope.The coating materials pair W/C is selected by the combination of the Spiller’ and Yamamoto’ criterion. Then the first coating structure is given by the way of Yamshita, and the optimization of the multilayer has been achieved by using the algorithm of simplex optimization. The flat reflectivity of broadband supermirror is 21% in the wavelength band of 0.0475nm⁰.0886nm at the grazing incident angle of 8.7mrad. The designed multilayer structure has been fabricated on the magnetron sputtering system and the measured reflectivity is around 15% in the range of 8.7mrad^15.7mrad by the X-ray reflectivity diffractometer （XRD）.更多还原