【作者】 黄廷磊； 李敏； 陈亚珠；

【Author】 Huang Tinglei~(1,2) Li Min~1 Cheng Yazhu~2 ~1(Department of Computer Science, Guilin Institute of Electronic Technology, Guilin 541004, China) ~2(College of Life Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China)

【机构】 桂林电子工业学院计算机系； 上海交通大学生命科学技术学院；

【摘要】 详细分析了洁净介质中颗粒状杂质检测的光学计数原理,并根据光散射理论推导出了消光式颗粒计数器中的光能与粒径之间的对应关系。通过数值计算,说明了消光原理在具体应用中存在的不足,分析了在对大颗粒测量时用光阻原理代替消光原理的可行性。设计了一套计数装置,增加了用于小颗粒检测的前向散射光探测器和光源波动监测器。实验结果表明,该套计数装置能够对0.5μm以上的颗粒进行检测,可以表征被测对象的洁净度。更多还原

【Abstract】 Counting principle for detecting particulate contamination in clean media is analyzed. Based on light scattering theory, the corresponding relation of light energy verse particle diameter is deduced. Numerical calculation showed that the shortage always goes with the particle counter of extinction type in practical application, at the same time, the feasibility of using light blockage principle for detecting larger particulate, instead of extinction light principle, is explained. A set of devices for counting particulate is constructed, which employed the detector for collecting forward scattering light and monitoring light source fluctuation. Experiments showed that the device could detect the particle no less than 0. 5μm and characterize the contamination degree in clean media.更多还原