【作者】 胡红革； 宋亚辉； 黄大贵；

【Author】 Hu Hongge~(1,2) Song Yahui~(1,2) Huang Dagui~1 ~1(Inst. of Mech. Electron. Eng., University of Electronic Science and Technology of China, Chengdu 610054, China) ~2(Computer Application Inst., China Academy Engineering Physics, Mianyang 621900, China)

【机构】 电子科技大学机电工程学院；

【摘要】 半导体加工系统是一个非常复杂的、离散事件和连续时间相结合的混合动态系统,离散Petri网不能很好地对这样的系统进行建模和分析,混合Petri网可以很好地描述半导体加工系统的静态属性及动态行为。实际上,运用离散Petri网将面临状态爆炸以及仿真的高消耗的问题。混合Petri网用来对半导体加工系统进行建模和仿真,这类模型用于微开关加工流程的建模和仿真,证明结果很精确并且仿真速度很快。更多还原

【Abstract】 The semiconductor manufacturing system, which is characterized by very complex, is a hybrid dynamic system involving discrete event and continuous time behaviors. Discrete Petri nets do not constitute an adequate tool for modeling and analysis. The static attribute and the dynamic actions of semiconductor manufacturing system can be modeled through hybrid Petri net. In fact, use of discrete Petri nets is confronted with the state explosion and the high cost of simulation. The hybrid Petri nets are used for modeling and simulation of semiconductor manufacturing systems. This model has been used for modeling and simulation of a micro-switch manufacturing systems, it provides an accurate and fast simulation of this system.更多还原