【作者】 李雯； 谭智敏； 刘理天；

【Author】 Li Wen Tan Zhimin Liu Litian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)

【机构】 清华大学微电子学研究所；

【摘要】 研究了影响3-D MEMS电感的电感值和Q值的主要因素,提出了电感值和Q值的理论计算模型。并利用该理论模型,对不同尺寸结构的三维微机械电感进行了数值模拟。根据理论计算的结果,设计了应用于射频通讯领域的高Q值3-DMEMS电感,并研究了电感制造的工艺流程。更多还原

【Abstract】 To optimize the design of 3-D MEMS inductors, the theoretic model was built to study the effects on inductance and Q factor. The factors, which will affect the Q value of 3-D inductors, are analyzed. The performance of different structure inductors was simulated. Based on the results, the 3-D MEMS inductor with high inductance and Q factor was designed. The technology process was also studied to fabricate the 3-D inductor.更多还原