【作者】 杨轶； 张林涛； 任天令； 刘理天；

【Author】 Yang Yi Zhang Lintao Ren Tianling Liu Lilian (Institute of Microelectronics, Tsinghua University, Beijing 100084, China)

【机构】 清华大学微电子学研究所；

【摘要】 利用ANSYS软件建立了压电微传声器的有限元模型,对器件进行了结构静力分析、模态分析、谐波分析,计算模拟出微传声器的本征频率。通过模拟和分析,对压电传声器的设计参数进行了优化。对比表明,有限元分析的结果与解析方法以及实验结果相一致。更多还原

【Abstract】 A piezoelectric acoustic sensor has been effectively studied using of the finite element analysis (FEA) tool-ANSYS. The device is composed of a Pt/PZT/Pt/SiO2/Si multi-layer membrane. Static and dynamic analysis of the micro-machined miniature acoustic sensor has been performed. It has been shown that ANSYS gives results comparable with those obtained from analytical methods and experiments. The device structure has been optimized and high performance can be realized.更多还原