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一种高精度微量气体泄漏检测仪的设计与研究
Research and Design of High Precision Micro Air-leakage Detector
【Author】 Tang Yuesheng Wu Xianda Li Feng Wan Lixin Xing Wu(Institute of Intelligent Machines,Chinese Academy of Sciences,Hefei 230031,China) (Anhui Zhongke Intelligent HI-TECH CO. ,LTD,Hefei 230088,China)
【机构】 中国科学院合肥智能机械研究所; 安徽中科智能高技术有限公司;
【摘要】 密封器件气密性检测是一项重要的安全检测之一,这里采用微差压原理,利用高精度差压传感器、精密对称气路和单片机测控系统组成测试装置,实现了对一定容积和压力下密封器件气密性的高精度检测。介绍了该检测仪的工作原理、硬件软件结构和系统性能。
【Abstract】 Airproof component airtight detection is one of important safety detections. In this paper,the device is introduced,which composed of high-precision micro differential pressure sensor,rigid symmetry air pipe loop and microchip system by using micro differential pressure principle,realizing airproof component’s high-precision air-proof detection under certain pressure and cubage. The principle,the hardware and software construction and its performance are discussed.
【Key words】 Micro differential pressure principle High precision Sensor Air-leakage detector;
- 【会议录名称】 第三次全国会员代表大会暨学术会议论文集
- 【会议名称】第三次全国会员代表大会暨学术会议
- 【会议时间】2002
- 【分类号】TH83
- 【主办单位】中国仪器仪表学会