【作者】 马连军； 詹科； 李哲； 秦林； 唐宾；

【Author】 MA Lianjun ZHAN Ke LI Zhe QIN Lin TANG Bin Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024

【机构】 太原理工大学表面工程研究所；

【摘要】 本文采用双层辉光等离子渗硼技术,以固体化合物 FeB 为供硼源,Ti6Al4V 合金为基体,研究了等离子渗硼过程中的不同温度下源极的溅射行为及其对渗硼层的影响。通过对等离子溅射前后的源极及试样的重量变化的测量,计算分析了不同温度下的源极溅射量和试样吸收率,温度越高源极溅射量越大。采用光学图像分析仪和辉光光谱分析仪检测了不同试样温度下的渗硼改性层的厚度和元素分布,温度越高渗硼层越厚。更多还原

【Abstract】 The paper aims to study the influence of temperature on the process of source cathode sputtering of plasma boronizing and modified layer component,with the double-glow discharge technique employing for boronizing on the Ti6Al4V alloy and FeB as the precursor.By testing the weight variation of the source cathode and specimen during process of the plasma sputtering,the source cathode’s sputtering quantity and the absorption rate of the specimens were calculated and analyzed on the different temperature.The thickness and the distribution of composition of the boronizing layer was tested by optical microscope and GDOES.The results show that the higher the temperature,the thicker the boronizing modified-layer and the more quantity of source cathode can be sputtered.更多还原