【作者】 陈良贤； 李成明； 陈飞； 刘政； 黑立富； 宋建华； 陈广超； 唐伟忠； 吕反修；

【Author】 CHEN Liangxian LI Chengming CHEN Fei LIU Zheng HEI Lifu SONG Jianhua CHEN Guangchao TANG Weizhong LV Fanxiu School of Material Science and Engineering, Beijing University of Science and Technology, Beijing 100083

【机构】 北京科技大学材料科学与工程学院；

【摘要】 利用直流等离子体喷射法在具有钛过渡层的钼复合衬底上制备了自支撑金刚石膜,目的是解决自支撑金刚石膜脱落时的裂纹问题。本文研究具有钛过渡层的钼衬底沉积无裂纹自支撑金刚石膜的界面特征。用扫描电子显微镜(SEM)观察界面的形貌特征,X 射线光电子谱(XPS)分析界面元素的化学状态,X 射线衍射谱(XRD)进行界面的相组成分析。结果显示:金刚石膜和钛过渡层之间存在碳化物,形成强结合。金刚石膜脱落时,过渡层在界面形成无序破坏而释放应力,有利于制备无裂纹的自支撑金刚石膜。更多还原

【Abstract】 A type of composite substrate on Mo substrate with Ti interlayer was explored to solve the problem of crack in the deposition of free-standing diamond films.Interface characteristics were investigated between diamond films and Ti interlayer by SEM,XPS and XRD.The micro-holes were formed on the nuclear side of diamond films due to Ti particles in the interlayer.The titanium carbide (TiC) was detected on the nuclear side of the diamond films,which played an important role with respect to reasonable adhesion with film and diamond nucleation.The results suggest that plating Ti interlayer on Mo substrate is an effective way to obtain non crack optical grade free standing diamond films.更多还原