【作者】 胡洋洋； 朱荻； 曾永彬； 明平美；

【机构】 南京航空航天大学； 河南理工大学；

【摘要】 微细电火花加工和微细电解加工是当前微细加工领域的研究热点,利用微细群电极进行加工可以显著提高加工效率。本文研究了UV-LIGA制作微工具电极技术。以金属为基底,采用UV-LIGA工艺来制作微细群电极,改进了前烘、后烘、显影等工艺参数,分别在铜和不锈钢基底上通过注射式倒胶的方法制作出厚度达1mm的SU-8胶结构,最大深宽比达10∶1,并通过微细电铸,获得了铜微细电极。更多还原

【Abstract】 Micro-EDM and Micro-ECM are the research hotspots in the Micro-fabrication field. Use the electrode arrays can enhance the efficiency of the Micro-EDM and the Micro-ECM. In order to fabricate the multiple electrodes,it’s necessary to use the metalsubstrate to fabricate the ultra-thick SU-8 microstructures in the UV-LIGA process. This paper optimized the characteristics of the UV-LIGA process such as coating method,pre-bake temperature & time,exposure time,post-bake temperature & time,and the development time. 1mm thick and 10:1 aspect ratio SU-8 micro-structures were fabricated through the constant–volume-injection casting on the substrates of copper and stainless steel. The micro electrode arrays was obtained through electroforming process.更多还原