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非平衡闭合场磁控溅射CrTiAlN/MoST复合涂层的性能研究
Study on properties of closed field unbalanced magnetron sputtered CrTiAlN/MoST coating
【Author】 SHI Wen XU Ying-jie XU Run-xiang ZENG Zhao-qin (School of materials science and engineering,Shanghai University,Shanghai 200072,China)
【机构】 上海大学材料科学与工程学院;
【摘要】 采用非平衡闭合场磁控溅射方法在 Cr12MoV 冷作模具钢表面制备 CrTiAlN 单一涂层和 CrTiAlN/MoST 复合涂层,通过 AFM、XRD、显微硬度、划痕和磨损试验综合分析涂层相结构和的表面性能。实验结果表明,CrTiAlN/MoST 复合涂层比 CrTiAlN 单一涂层更光滑、致密,(Cr,Ti,Al)N 在(111)晶面呈强烈的衍射峰,无明显的 MoS2衍射峰.Cr12MoV 经 PVD 处理后, 表面显微硬度和耐磨性得到了明显的提高,尤其是复合涂层,由于 CrTiAlN 硬涂层抗磨和 MoST 软涂层减摩的综合作用表现出比 CrTiAlN 涂层更低的磨损率,主要的磨损机制为逐层剥落的疲劳磨损。
【Abstract】 CrTiAIN and CrTiAIN/MoST coatings were prepared on Cr12MoV steel using a closed field unbalanced magnctron sputtering technique.The coated surface properties were characterized by AFM,XRD,microhardness,scratch and wear tests.The experimental results show the CrTiAIN/MoST coating was found to be smoother and with density higher than the CrTiAlN coating, while its crystal structure was similar to CrTiAIN combined with amorphous phase or submicro-crystals of MOST.The surface microhardncss and wear resistance of Cr12MoV steel wcrc significantly improved by the PVD coatings.The CrTiAIN/MoST coating exhibited a lower wear rate compared to the CrTiAlN,due to a hard,tough CrTiAIN coating and self-lubricated MoST coating.The wear mechanism acted was mainly fatigue wear by gradual layer pitting,
【Key words】 Cr12MoV steel; Magnetron sputtering; CrTiA1N/MoST coating; Friction and wear;
- 【会议录名称】 第九次全国热处理大会论文集(二)
- 【会议名称】第九次全国热处理大会
- 【会议时间】2007-09
- 【会议地点】中国辽宁大连
- 【分类号】TG174.4
- 【主办单位】中国机械工程学会热处理学会