【作者】 杜立群； 赵海波； 吕岩；

【Author】 Du Liqun Zhao Haibo Lu YanKey Laboratory for Precision and Non -traditional Machining Technology of Ministry of Education. Dalian University of Technology, Dalian, 116024

【机构】 大连理工大学精密与特种加工技术教育部重点实验室；

【摘要】 对水热合成法制备Pb(Zr1-xTix)O3(PZT)薄膜的原理进行了讨论,以钛、锆的醇盐和硝酸铅等为原料制备出PZT压电薄膜,利用X射线衍射对PZT压电薄膜的成分进行了分析,利用扫描电子显微镜(SEM)对PZT晶体形成过程的变化进行了分析。X射线衍射分析表明,晶体成核阶段,PbZrO3(PZ)成分较多,晶体生长阶段,PZ成分减少,PZT成分逐渐增多。2次重复生长过程后,SEM扫描图像所得为四方形PZT晶体,颗粒平均尺寸为5μm,与Shimomura和Kanda实验所得的PZT晶体颗粒在大小和形状上基本相同,为钙钛矿型结构。更多还原

【Abstract】 This paper presented the theory of preparing the PZT thin film by the hydrothermal method. We also prepared the PZT thin film with the material such as Ti, Zr and PbNO3. We used XRD, SEM and EDX to analysis the final PZT thin film. XRD shows the film is mainly made up of PZT. The SEM photographs of the deposited PZT film surface show the crystal is cubic perovskite structure, and each crystal side is about 5μm. EDX indicates that the film is made up of PZ and PZT during crystal nucleation, but after crystal growing step, PZT increases and PZ decreases.更多还原