【作者】 马向国； 顾文琪；

【Author】 Ma Xiangguo Gu Wenqi Institute of Electrical Engineering, Chinese Academy of Science,Beijing, 100080 Graduate School of Chinese Academy of Science, Beijing, 100039

【机构】 中国科学院电工研究所；

【摘要】 叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备。发射尖的腐蚀采用自主开发的一套发射尖腐蚀设备腐蚀而成,该设备保证了源尖腐蚀工艺的可靠性和可重复性,腐蚀后的发射尖曲率半径在0.5-5μm之间。液态金属储备槽采用同轴针形结构,槽的材料采用高温下不易与金属镓发生反应的金属钼,这种源结构的优点是可以调节发射尖伸出合金槽的长度,储备的液态金属多,减少了液态金属蒸发对系统造成的污染,源发射尖到达寿命后结构仍可使用,该源具有良好的发射特性(达到100μA)、长寿命(1000h以上)和稳定度。该源与纳米聚焦离子束系统结合,将为纳米离子束加工带来新的发展前景,从而为研究其他单质源或合金源提供经验。更多还原

【Abstract】 In this paper, Development of liquid metal ion source for nanometer focused ion beam system is introduced. We developed a set of device for the Eroding of emitting needle. By using this device, eroding technics of emitting needle can be repeated and has high reliability. The tip curvature radius of emitting needle is 0. 5- 5.0μm. This liquid metal ion source has a column reservoir that is made of molybdenum metal which can not react easily in high temperature. The emitting needle is fit in column reservoir in the same axes. This kind of ion source frame has many merits. For example, it can adjust distance between emitting tip and the hole of column reservoir. It can deposited a lot of liquid metal, which can prolong the life of ion source. It also can decrease the pollution to system because of liquid metal vaporizing and can be used again when emitting needle pass away.. The total emission current of the source can be reached as high as 100μA. The best stability is more than 5% per hours and the source’s lifetime is more than 1000 hours. This source will be set in a nanometer focused ion beam system, which can bring new foreground for nano -fabrication of ion beam. The practical experience of making this source will be useful to other specialists and scholars when they study other metal and alloy sources.更多还原