【作者】 张清涛； 李艳秋； 尚永红； 刘少波；

【Author】 Zhang Qingtao Li Yanqiu Shang Yonghong Liu Shaobo Institute of Electrical Engineering,Chinese Academy of Sciences, Beijing, 100080

【机构】 中国科学院电工技术研究所；

【摘要】 利用溶胶凝胶(sol-gel)技术制备Pb(Mg1/3Nb2/3)O3-PbTiO3(PMNT)铁电薄膜,研究了不同的溶剂对溶胶的配制和溶胶稳定性的影响,得到了可以长期稳定放置的溶胶;采用热重分析和差热分析的方法研究了凝胶的热解过程,确定了420℃为溶胶的热解温度,750℃为合理的结晶温度;以Pt/Ti/Si(100)为衬底,成功地制备了0.9Pb(Mg1/3Nb 2/3)O2-0.1Pb TiO3铁电薄膜。通过X射线衍射分析了热处理温度对薄膜相的影响。通过高倍显微镜研究了薄膜的表面形态,通过ZT-Ⅱ型铁电参数测试仪对PMNT薄膜进行了铁电性能测试。测试结果表明,制备的PMNT铁电薄膜为具有完全钙钛矿相的弛豫性PMNT铁电薄膜,薄膜无裂纹,致密性好,其剩余极化和矫顽场分别可达到2.5μC/cm2和45kV/cm。更多还原

【Abstract】 Pb(Mg1/3Nb2/3)O3-PbTiO3(namely, PMNT)thin film was prepared using the sol-gel method. The effects of different solvents on the precursor solution were studied, and the stable precursor solution was achieved. The thermal gravity analysis (TGA) and differential thermal analysis (DTA) were performed on the precursor to examine the decomposition behavior of residual organics and analyze the phase - formation kinetics from the dried gel. The results show thin film pyrolyzed at 420℃ and crystallized at 750℃. 0. 9Pb (Mg1/3Nb2/3) O3-0.1PbTiO3 thin films were investigated by X -ray diffraction (XRD), microscope, ZT -II ferroelectric test system. The results indicate that the PMNT thin films are of uniformity, density, and crack -free. The remnant polarizations (Pr), coercive field (Ec) are 2. 5μC/cm2 and 45kV/cm, respectively.更多还原