【作者】 方杰； 刘泽文； 陈忠民； 刘理天； 李志坚；

【Author】 Fang Jie Liu Zewen Chen Zhongmin Liu Lilian Li Zhijian Tsinghua University, Beijing, 100084

【机构】 清华大学；

【摘要】 介绍了一种利用MEMS工艺实现的用于射频领域的无源LC低通滤波器的设计、仿真和制作。该低通滤波器(LPF)采用三阶Chebyshev最少电容原型结构,设计参数为:-3dB带宽为3GHz,插入损耗小于2dB。基于MEMS无源元件(电容和电感)的集总物理模型,实现了对LPF实际性能的等效电路仿真,同时进行了版图和结构的验证。利用MEMS工艺实现的低通滤波器,其-3dB带宽和通带内插入损耗分别为2.925GHz和1.2dB(在1GHz下),制作工艺与标准CMOS工艺兼容。更多还原

【Abstract】 The design, simulation and fabrication of a RF MEMS LC low -pass filter were presented. The LPF design was based on a basic minimum capacitor prototype structure, with -3dB bandwidth of 3GHz and midband insertion loss of less than 2dB. According to the physical model of on-chip MEMS inductors and MIM capacitors, the equivalent circuit of LPF was simulated and verified with layout and structural simulation. The LPF was accomplished with MEMS process, which is compatible with standard CMOS IC technology. Measurement results give - 3dB bandwidth of 2. 925GHz and midband insertion loss of 1. 2dB at 1GHz.更多还原